Users Manual

FCC ID QTA-RFWC812A

Integral Wafer RF Carrier System for 200 and 300mm Wafers

KLA Corporation

1. FCC ID
2. KLA Corporation
3. QTA-RFWC812A
4. Users Manual

Document ID #2420610

This document is available from the following links. Linking directly to FCC.gov may result in an error.

• https://apps.fcc.gov/eas/GetApplicationAttachment.html?id=2420610
• https://fccid.io/QTA-RFWC812A/User-Manual/Users-Manual-2420610
• https://fccid.io/QTA-RFWC812A/User-Manual/Users-Manual-2420610.pdf

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