User Manual

FCC ID QTA-AF120

SensArray Automation FOUP

KLA Corporation

1. FCC ID
2. KLA Corporation
3. QTA-AF120
4. User Manual

Document ID #4698677

This document is available from the following links. Linking directly to FCC.gov may result in an error.

• https://apps.fcc.gov/eas/GetApplicationAttachment.html?id=4698677
• https://fccid.io/QTA-AF120/User-Manual/User-Manual-4698677
• https://fccid.io/QTA-AF120/User-Manual/User-Manual-4698677.pdf

Sending you directly to the document available from FCC.gov...